Facilities


Assembly and microelectronic packaging techniques as well as electrical, optical or reliability test methods are carried out in a  laboratory of about 150 m² with a cleanroom cabine (ISO6/ 1000).

Probing

Manual PM5 Probe Station

Manual PM8 Probe Station

Automatic PA300 Probe Station

Inspection

Optical IC Microscopy

 

Laserscan Microscope

Mechanics

Pull-Shear-Tester

X-Y-Z Linear-Table-System

Bonding

Semiautomatic Wire Bonder

Solder Ball Placement System

Automated Sub-micron Die Bonder

Selection Guide of Equipment

Some components of the following equipment catalogue are installed in the lab or are temporarily implemented in remotely controlled measurement systems for project-related test purposes.

EDA/ CAD

ASIC design

  • Software
    • CADENCE IC Design
    • Mentor IC Verification
    • Synopsys TCAD & FEV
  • Designkits
    • IBM 130/250/350nm (Bi)CMOS
    • AMS 350nm BiCMOS TSMC 130nm
    • CMOS Chartered 130nm CMOS
    • Tezzaron 3D

Board design

  • Mentor DxDesigner - Expedition flow
  • Polar Si9000 Field Solver Polar
  • Speedstack PCB Stack Up Builder

 

Mechanic design

  • Solid Edge UGS Velocity Series V18

Assembly, Interconnection & Packaging

Optical Inspection & Profilometry Microscopy

  • Keyence VK-8700 Laserscan Microscope
  • Keyence VHX-5000 Digital Microscope
  • LEICA IC-Microscope DMRME
  • Nikon MZ 16 Microscope
  • LANG High-Precision (3µm absolut) 3-Axis Linear-Table
  • HERAEUS Heating Chambers UT6060
  • GLT-Janome JR500

Placement/Bonding Tools

  • Finetech Femto Fineplacer
  • Finetech Pico MA Fineplacer
  • F & K DELVOTEC 5430 Wire Bonder
  • XYZTec Pull-Shear-Tester Condor 100

 

Bumping Tool

  • PacTech SB2 Jet

 

Characterization and Test

ATE

  • LabView
  • HP-VEE
  • HP 82000 Digital Tester
  • Probestation PM5 with ERS AirCool Chuck System & Shield Enclosure
  • Probestation PM8 with Laser Cutting System
  • Probestation PA300 with Peltier Cooler Chuck System & Shield Enclosure

 

Generators

  • TEK DTG5334
  • TEK HFS 9003
  • TEK DG2020A
  • HP 8082A
  • HP 8133A
  • HP 8130A
  • PHILIPS PM 5770
  • AGILENT 81150A
  • KEITHLEY AWG3390

 

Noise Generator

  • Noise/COM NC 6110

 

Analyzers

  • HP 4156A
  • TEK TLA6202

 

Spectrum Analyser

  • R&S FSU
  • R&S SML03

 

Oscilloscopes

  • LeCroy WaveMaster 808Zi
  • LeCroy SDA760Zi-A
  • TEK MSO70404C
  • TEK DPO7354C
  • TEK MSO5204
  • TEK TDS 540
  • TEK CSA 803A
  • TEK TDS 684A
  • TEK TDS 5054B
  • TEK 2465
  • HP 54720D

 

Optical Spectrum Analyzer

  • ANDO AQ 6331

 

Universal Counter

  • HP 53158

 

Multi-/Voltmeters

  • PREMA 5017SC
  • HP 3458A
  • HP 4284A Precision LCR Bridge
  • KEITHLEY 6514 Electrometer

 

Temperature Test Chamber

  • VÖTSCH VT4002